Eastman EastaPure™ products

EastaPure solvents, ketones, and acids find utility in nearly every step of semiconductor manufacturing, including:

  • Surface preparation/adhesion promotion
  • Spin on photoresist
  • Edge bead removal
  • Anti reflective coatings (TARC/BARC) 
  • Developers
  • Etchants
  • Strippers/residue removers
  • Cleaners

Eastman’s solvent portfolio includes more than 80 alcohols, esters, glycol ether esters, glycol ethers, ketones, and other specialty products. The products listed below are offered in the EastaPure family, but if you need a solvent that is not listed here, let us know. Chances are we can make an EastaPure grade that will suit your needs.

SolventEastman productDownloads
PGMEA PM acetate F-346
EGBE EB solvent SOL-ELEC-022
DEGBE DB solvent F-354
2-heptanone MAK F-347

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EastaPure - Acetic Acid
Eastman EastaPure™ acetic acid has an extremely low metal content and is an excellent choice for use in etching solutions for semiconductor chips and other electronic applications.

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EastaPure - N-Butyl Acetate
Eastman EastaPure™ n-Butyl Acetate solvent is offered for negative and positive photoresist formulations and is used to make semiconductor chips.

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EastaPure - DB Solvent (DEGBE or Diethylene glycol monobutyl ether)
Eastman EastaPure™ DB Solvent is a high boiling, slow evaporating glycol ether providing low trace metals content for sensitive electronic applications.

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EastaPure - EB Solvent (EGBE or Ethylene glycol monobutyl ether)
Eastman EastaPure™ EB solvent is a high flash point, water miscible, colorless solvent providing slow evaporation rate and good viscosity control for a broad range of polymers, resins and coatings.

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EastaPure - EP Solvent
Eastman EastaPure™ EP solvent is a high flash point, water miscible, colorless solvent providing slow evaporation rates and good viscosity control for a broad range of polymers, resins and coatings.

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EastaPure - Ethyl Acetate
Eastman EastaPure™ Ethyl Acetate solvent is a viscosity reducer for resins used in photoresist formulations.

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EastaPure - MAK Solvent (2-heptanone or methyl n-amyl ketone)
Eastman EastaPure™ MAK (Methyl n-Amyl Ketone) is being offered for positive photoresist formulations. It is a high-purity, low-trace metal solvent.

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EastaPure - MPK Solvent (2-pentanone or methyl propyl ketone)
Eastman EastaPure™ MPK solvent can be utilized in a variety of specialty cleaning operations.

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EastaPure - PM Acetate (PGMEA or propylene glycol monomethyl ether acetate)
Eastman EastaPure™ PM acetate is being offered for photoresist formulations. It is a slow evaporating solvent with both ether and ester functional groups.

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EastaPure - PM Acetate - Stabilized (PGMEA or propylene glycol monomethyl ether acetate)
Eastman EastaPure™ PM Acetate, Stabilized is manufactured for semiconductor and electronics applications. It is a high-purity solvent which provides greater protection against organic peroxide formation.

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